| ATOS Compact Scan 2M | ATOS Compact Scan 5M | |
| Camera Pixels | 2 x 2 000 000 | 2 x 5 000 000 |
| Minimum Measuring Area | 35 x 35 mm | 40 x 40 mm |
| Maximum Measuring Area | 1000 x 1000 mm | 1200 x 1200 mm |
| Point Spacing | 0.021 – 0.615 mm | 0.017 – 0.481 mm |
| Working Distance | 450 – 1200 mm | 450 – 1200 mm |
| Operating Temperature | 5 – 40°C | 5 – 40°C |

